Publications about Atomic Layer Etching (ALE)

  1. Sabbir A. Khan, Dmitry B. Suyatin, Jonas Sundqvist, Mariusz Graczyk, Marcel Junige, Christoffer Kauppinen, Anders Kvennefors, Maria Huffman, Ivan Maximov:  "High-Definition Nanoimprint Stamp Fabrication by Atomic Layer Etching".  In:  ACS Applied Nano Materials 1, 2476-2482 (2018).  – DOI:10.1021/acsanm.8b00509  6 citations