Publications about Atomic Layer Etching (ALE)
- Sabbir A. Khan, Dmitry B. Suyatin, Jonas Sundqvist, Mariusz Graczyk, Marcel Junige, Christoffer Kauppinen, Anders Kvennefors, Maria Huffman, Ivan Maximov: "High-Definition Nanoimprint Stamp Fabrication by Atomic Layer Etching". In: ACS Applied Nano Materials 1, 2476-2482 (2018). – DOI:10.1021/acsanm.8b00509 6 citations