Publications about Molecular Layer Deposition (MLD)

  1. Marcel Junige, Steven M. George:  "Area-selective molecular layer deposition of nylon 6,2 polyamide: Growth on carbon and inhibition on silica".  In:  Journal of Vacuum Science & Technology A 39, 023204 (2021).  – DOI:10.1116/6.0000769  13 citations