Publications in Peer-Reviewed Scientific Journals and
Multi-Page Contributions in Peer-Reviewed Conference Proceedings
- Samantha M. Rau, Rebecca J. Hirsch, Marcel Junige, Andrew S. Cavanagh, Antonio L. P. Rotondaro, Hanna Paddubrouskaya, Kate H. Abel, Steven M. George: "Strongly and Weakly Adsorbed H2O Layer Thicknesses on Hydroxylated SiO2 Surfaces versus H2O Pressure at Various Substrate Temperatures". In: The Journal of Physical Chemistry C 129, 1666-1677 (2025). – DOI:10.1021/acs.jpcc.4c06859 Invited Paper
- Marcel Junige, Steven M. George: "Selectivity Between SiO2 and SiNx During Thermal Atomic Layer Etching Using Al(CH3)3/HF and Spontaneous Etching Using HF & Effect of HF+NH3 Co-Dosing". In: Chemistry of Materials 36, 6950-6960 (2024). – DOI:10.1021/acs.chemmater.4c01040 Invited Paper 2 Citations
- Michael A. Collings, Marcel Junige, Andrew S. Cavanagh, Victor Wang, Andrew C. Kummel, Steven M. George: "Electron-Enhanced Atomic Layer Deposition of Ru Thin Films Using Ru(DMBD)(CO)3 and Effect of Forming Gas Anneal". In: Journal of Vacuum Science & Technology A 41, 062408 (2023). – DOI:10.1116/6.0002938 Editor's Pick 2 Citations
- Marcel Junige, Steven M. George: "Area-Selective Molecular Layer Deposition of Nylon 6,2 Polyamide: Growth on Carbon and Inhibition on Silica". In: Journal of Vacuum Science & Technology A 39, 023204 (2021). – DOI:10.1116/6.0000769 Editor's Pick 19 Citations
- Matthew B. E. Griffiths, Zachary S. Dubrawski, Peter G. Gordon, Marcel Junige, Seán T. Barry: "Thermal Ranges and Figures of Merit for Gold-Containing Precursors for Atomic Layer Deposition". In: Journal of Vacuum Science & Technology A 39, 022401 (2021). – DOI:10.1116/6.0000707 1 Citations
- Sebastian Killge, Irene Bartusseck, Marcel Junige, Volker Neumann, Johanna Reif, Christian Wenzel, Mathias Böttcher, Matthias Albert, M. Jürgen Wolf, Johann W. Bartha: "3D System Integration on 300 mm Wafer Level: High-Aspect-Ratio TSVs with Ruthenium Seed Layer by Thermal ALD and Subsequent Copper Electroplating". In: Microelectronic Engineering 205, 20-25 (2019). – DOI:10.1016/j.mee.2018.11.006 18 Citations
- Sabbir A. Khan, Dmitry B. Suyatin, Jonas Sundqvist, Mariusz Graczyk, Marcel Junige, Christoffer Kauppinen, Anders Kvennefors, Maria Huffman, Ivan Maximov: "High-Definition Nanoimprint Stamp Fabrication by Atomic Layer Etching". In: ACS Applied Nano Materials 1, 2476-2482 (2018). – DOI:10.1021/acsanm.8b00509 9 Citations
- Marcel Junige, Markus Löffler, Marion Geidel, Matthias Albert, Johann W. Bartha, Ehrenfried Zschech, Bernd Rellinghaus, Willem F. van Dorp: "Area-Selective Atomic Layer Deposition of Ru on Electron-Beam-Written Pt(C) Patterns versus SiO2 Substratum". In: Nanotechnology 28, 395301 (2017). – DOI:10.1088/1361-6528/aa8844 14 Citations
- Marcel Junige, Tim Oddoy, Rositsa Yakimova, Vanya Darakchieva, Christian Wenger, Gregorz Lupina, Julia Kitzmann, Matthias Albert, Johann W. Bartha: "Atomic Layer Deposition of Al2O3 on NF3-Pre-Treated Graphene". In: Nanotechnology VII : May 4-6, 2015, in Barcelona, Spain ; Proceedings Volume 9519 (Society of Photo-Optical Instrumentation Engineers (SPIE): Barcelona, 2015), 951915. – DOI:10.1117/12.2181242 3 Citations
- Marcel Junige, Varun Sharma, Ralf Tanner, Daniel Schmidt, Greg Pribil, Matthias Albert, Mathias Schubert, Johann W. Bartha: "In-Situ Real-Time Monitoring and Control of Kinetic Processes in Atomic Layer Depositions by Spectroscopic Ellipsometry with 1.25 Hz Sampling Rate". In: International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) : April 14-16, 2015 in Dresden, Germany (National Institute of Standards and Technology (NIST): Dresden, 2015), 186-188. – DOI:10.13140/RG.2.1.4138.4485
- Christian Wenger, Julia Kitzmann, Andre Wolff, Mirko Fraschke, Christian Walczyk, Gregorz Lupina, Wolfgang Mehr, Marcel Junige, Matthias Albert, Johann W. Bartha: "Graphene Based Electron Field Emitter". In: Journal of Vacuum Science & Technology B 33, 01A109 (2015). – DOI:10.1116/1.4905937 12 Citations
- Martin Knaut, Marcel Junige, Volker Neumann, Henry Wojcik, Thomas Henke, Christoph Hossbach, Andre Hiess, Matthias Albert, Johann W. Bartha: "Atomic Layer Deposition for High Aspect Ratio Through Silicon Vias". In: Microelectronic Engineering 107, 80-83 (2013). – DOI:10.1016/j.mee.2013.01.031 40 Citations
- Marion Geidel, Marcel Junige, Matthias Albert, Johann W. Bartha: "In-Situ Analysis on the Initial Growth of Ultra-Thin Ruthenium Films with Atomic Layer Deposition". In: Microelectronic Engineering 107, 151-155 (2013). – DOI:10.1016/j.mee.2012.08.026 17 Citations
- Henry Wojcik, Marcel Junige, Johann W. Bartha, Matthias Albert, Volker Neumann, Ulrich Merkel, Anita Peeva, Jürgen Gluch, Siegfried Menzel, Frans Munnik, Romy Liske, Dirk Utess, Inka Richter, Christoph Klein, Hans-Jürgen Engelmann, Paul Ho, Christoph Hossbach, Christian Wenzel: "Physical Characterization of PECVD and PEALD Ru(-C) Films and Comparison with PVD Ruthenium Film Properties". In: Journal of the Electrochemical Society 159, H166-H176 (2012). – DOI:10.1149/2.066202jes 22 Citations
- Martin Knaut, Marcel Junige, Matthias Albert, Johann W. Bartha: "In-Situ Real-Time Ellipsometric Investigations during the Atomic Layer Deposition of Ruthenium: A Process Development from [(EthylCyclopentadienyl)(Pyrrolyl)Ruthenium] and Molecular Oxygen". In: Journal of Vacuum Science & Technology A 30, 01A151 (2012). – DOI:10.1116/1.3670405 30 Citations
- Marcel Junige, Marion Geidel, Martin Knaut, Matthias Albert, Johann W. Bartha: "Monitoring Atomic Layer Deposition Processes In Situ and in Real-Time by Spectroscopic Ellipsometry". In: Semiconductor Conference Dresden (SCD) : September 27-28, 2011, in Dresden, Germany (Institute of Electrical and Electronics Engineers (IEEE): Dresden, 2011), 1-4. – DOI:10.1109/scd.2011.6068739 9 Citations
- Henry Wojcik, Ulrich Merkel, Andreas Jahn, Karola Richter, Marcel Junige, Christoph Klein, Jürgen Gluch, Matthias Albert, Frans Munnik, Christian Wenzel, Johann W. Bartha: "Comparison of PVD, PECVD & PEALD Ru(-C) Films as Cu Diffusion Barriers by Means of Bias Temperature Stress Measurements". In: Microelectronic Engineering 88, 641-645 (2011). – DOI:10.1016/j.mee.2010.06.034 10 Citations
Patents
- Steven M. George, Marcel Junige: “Selective Etching of Silicon Dioxide and Silicon Nitride Containing Materials”. US Patent Application #63/706,979 (October 14, 2024).
Academic Theses
- Marcel Junige: “Entwicklung und Charakterisierung eines Prozesses zur Thermischen Atomlagenabscheidung von Ruthenium mit In-Situ Messtechnik” (Development and Characterisation for a Thermal Activated Atomic Layer Deposition Process of Ruthenium via In-Situ Measurement Techniques). Diploma Thesis (Technische Universität Dresden: January 26, 2011). – urn:nbn:de:bsz:14-qucosa-65342 GLOBALFOUNDRIES Award
- Marcel Junige: “Untersuchung und Optimierung eines Plasmagestützten Ruthenium-ALD-Prozesses” (Investigating and Optimizing a Plasma-Enhanced ALD Process for Ruthenium). Student Research Project (Technische Universität Dresden: September 28, 2009). – DOI:10.2314/GBV:624718476
Supervised Academic Theses and Student Research Projects
- Prathibha Raman: “Advanced Aspects of Metal Atomic Layer Deposition: Barrier Properties against Copper Diffusion and Area Selectivity”. Master’s Thesis (Technische Universität Dresden: January 10, 2019).
[academic supervisors: Marcel Junige, Sebastian Killge, Christian Wenzel; Johann W. Bartha] - Abhishek V. Thakur: “Atomic Layer Deposition of Hafnium Oxide: Process Development and Nucleation Study on Graphene Utilizing In-Situ Real-Time Spectroscopic Ellipsometry”. Student Research Project (Technische Universität Dresden: March 16, 2018).
[academic supervisors: Marcel Junige, Matthias Albert, Johann W. Bartha] - Johanna Reif: “In-Vacuo Untersuchungen zum Initialen Aufwachsverhalten bei der Atomlagenabscheidung mittels Röntgenphotoelektronenspektroskopie und Rastersondentechniken” (In-Vacuo Investigations of the Initial Growth for Atomic Layer Deposition Utilizing X-Ray Photoelectron Spectroscopy and Scanning Probe Techniques). Diploma Thesis (Technische Universität Dresden: January 28, 2016). GLOBALFOUNDRIES Award
[academic supervisors: Marion Geidel, Marcel Junige, Johann W. Bartha] - Ralf Tanner: “Requalifying a Reactor for the Atomic Layer Deposition of Aluminium Oxide, Tantalum Nitride, as well as Ruthenium”. Student Research Project (Technische Universität Dresden: November 30, 2015).
[academic supervisors: Marcel Junige, Johann W. Bartha] - Shashank Balasubramanyam: “Growth Behavior and Functional Film Properties in Atomic Layer Deposition”. Master’s Thesis (Technische Universität Chemnitz: February 20, 2015).
[academic supervisors: Marcel Junige, Thomas Wächtler, Stefan E. Schulz, Johann W. Bartha] - Tim Oddoy: “Untersuchung zum Anfangswachstum der Atomlagenabscheidung Ultra-Dünner Dielektrischer Schichten auf einer Graphen-Monolage”. Interdisciplinary Student Research Project (Technische Universität Dresden: September 22, 2014).
[academic supervisors: Marcel Junige, Volker Neumann, Johann W. Bartha] - Varun Sharma: “Spectroscopic Ellipsometry for the In-Situ Investigation of Atomic Layer Depositions”. Student Research Project (Technische Universität Dresden: April 30, 2014). – urn:nbn:de:bsz:14-qucosa-146530
[academic supervisors: Marcel Junige, Martin Knaut, Johann W. Bartha] - Tillmann F. Walther: “Beeinflussung Funktionaler Schichteigenschaften bei der Thermischen Atomlagenabscheidung von Tantalnitrid sowie Ruthenium”. Diploma Thesis (Technische Universität Dresden: March 14, 2014). – urn:nbn:de:bsz:14-qucosa-167301
[academic supervisors: Marcel Junige, Christoph Klaus, Johann W. Bartha]
Invited Presentations, Tutorials, and Lectures
at International Advanced Schools, Workshops, or Symposia
- Marcel Junige, Steven M. George: “Gas-Phase Methods for Selective Thermal Atomic Layer Etching of Si-Based Materials”. In: Industry Strategy Symposium (ISS) : January 07–10, 2024, in Half Moon Bay, CA, USA (SEMI: 2024). Invited Poster & 2-min Pitch
- Marcel Junige: “In-Situ Metrology Techniques in ALD”. In: Workshop “ALD for Industry” : January 17–18, 2017, in Dresden, Germany (European Society of Thin Films (EFDS): Dresden, 2017). Invited 30-min Tutorial
- Marcel Junige, Jonas Sundqvist: “Chemical Path to Atomic Layer Etching”. In: Novel high-k application workshop : March 14–15, 2016, in Dresden, Germany. (Nano-electronic Materials Laboratory gGmbH (NaMLab): 2016). Invited Talk
- Marcel Junige: “In-Situ Characterization for ALD/MLD”. In: Summer School “Atomic Layer Deposition: Method and Applications” : July 6–10, 2015, in Brescia, Italy (COST Action MP1402 – Hooking together European research in Atomic Layer Deposition (HERALD): 2015). Invited 90-min Lecture
Oral or Poster Contributions
at Internationally Established, Peer-Reviewed Conferences and Workshops