Publications about In-Situ Real-Time Spectroscopic Ellipsometry Methodology

  1. Marcel Junige, Varun Sharma, Ralf Tanner, Daniel Schmidt, Greg Pribil, Matthias Albert, Mathias Schubert, Johann W. Bartha:  "In-situ real-time monitoring and control of kinetic processes in Atomic Layer Depositions by Spectroscopic Ellipsometry with 1.25 Hz sampling rate".  In:  International Conference on Frontiers of Characterization and Metrology for Nanoelectronics (FCMN) : April 14-16, 2015 in Dresden, Germany (National Institute of Standards and Technology (NIST): Dresden, 2015), 186-188.  – DOI:10.13140/RG.2.1.4138.4485
  2. Marcel Junige, Marion Geidel, Martin Knaut, Matthias Albert, Johann W. Bartha:  "Monitoring atomic layer deposition processes in situ and in real-time by spectroscopic ellipsometry".  In:  Semiconductor Conference Dresden (SCD) : September 27-28, 2011, in Dresden, Germany (Institute of Electrical and Electronics Engineers (IEEE): Dresden, 2011), 1-4.  – DOI:10.1109/scd.2011.6068739  9 citations