European Commission · Horizon 2020
(Marie Skłodowska-Curie Individual Fellowship)
proposal acronym: DISCOVERY
Tackling future trends and societal challenges urgently needs digital technologies.
Already today electronic mass products contain individual device structures with dimensions and tolerances on the very-few (2-5) nanometer scale. But the fabrication of such highly sophisticated nanosystems significantly requires more and more processing technologies with atomic-level precision. Thus, ALD (atomic layer deposition) has been established for the past decade as a coating technique. However, the counterpart material-removal technique ALE (atomic layer etching) has emerged just very recently. In combination, ALD plus ALE will sum up to ALP (Ångström-level processing), which gives control over selective material addition and subtraction, respectively, on the atomic scale.
This MSCA (Marie Skłodowska-Curie Action) targets at the topical
DISCOVERY of selective ALE (atomic layer etching) by irtSE (in-situ real-time spectroscopic ellipsometry).
In recent years Dipl.-Ing. Marcel Junige has pushed ahead the real-time resolution of irtSE and complimented it’s sub-Å precision by synergistic in-vacuo techniques (notably PES: photo-electron spectroscopy & SPM: scanning probe microscopy). With this advanced hybrid metrology setup he will now reveal an unprecedented deep insight towards an atomistic understanding of the physico-chemical mechanisms of (thermal-activated & plasma-enhanced) ALE, as well as selectivity.
The ultimate goal is to establish an ALP toolbox at TU Dresden with capabilities for
- selective ALD & ALE processing, and
- in-situ real-time plus in-vacuo characterization,
- both approaching the atomic scale.
This highly advanced technology setup will then serve as credible foundation for follow-up projects engaging in the realization of ‘More-than-Moore’ or ‘beyond CMOS’ devices.
At the forefront of nanotechnology this “DISCOVERY” will cross borders between chemistry, physics, and engineering; between the European industry partner (Dr. Mike Cooke at Oxford Instruments) and academia (Prof. Dr. Steven M. George at CU Boulder, Prof. Dr.-Ing. Thomas Mikolajick at TU Dresden & NaMLab); between the United Kingdom, the United States of America, and Germany.
Further information is summarized on the following pages. Protected content is indicated by (∗).
Password is the 6-digit proposal number.
- motivation (proposal section 1.1) (∗)
- project-specific objectives & overview of the proposed action (proposal section 1.1) (∗)
- originality & innovation aspects: level of novelty & high-quality (proposal section 1.1) (∗)
- participating partner organizations
- institutional environment (infrastructure) (proposal section 3.3)
- time schedule & work plan with allocated tasks and secondment (proposal section 3.1) (∗)