European Commission · Horizon 2020

call: H2020-MSCA-IF-2017
(Marie Skłodowska-Curie Individual Fellowship)
proposal acronym: DISCOVERY

Tackling future trends and societal challenges urgently needs digital technologies.

Already today electronic mass products contain individual device structures with dimensions and tolerances on the very-few (2-5) nanometer scale. But the fabrication of such highly sophisticated nanosystems significantly requires more and more processing technologies with atomic-level precision. Thus, ALD (atomic layer deposition) has been established for the past decade as a coating technique. However, the counterpart material-removal technique ALE (atomic layer etching) has emerged just very recently. In combination, ALD plus ALE will sum up to ALP (Ångström-level processing), which gives control over selective material addition and subtraction, respectively, on the atomic scale.

This MSCA (Marie Skłodowska-Curie Action) targets at the topical

DISCOVERY of selective ALE (atomic layer etching) by irtSE (in-situ real-time spectroscopic ellipsometry).

In recent years Dipl.-Ing. Marcel Junige has pushed ahead the real-time resolution of irtSE and complimented it’s sub-Å precision by synergistic in-vacuo techniques (notably PES: photo-electron spectroscopy & SPM: scanning probe microscopy). With this advanced hybrid metrology setup he will now reveal an unprecedented deep insight towards an atomistic understanding of the physico-chemical mechanisms of (thermal-activated & plasma-enhanced) ALE, as well as selectivity.

The ultimate goal is to establish an ALP toolbox at TU Dresden with capabilities for

  1. selective ALD & ALE processing, and
  2. in-situ real-time plus in-vacuo characterization,
  3. both approaching the atomic scale.

This highly advanced technology setup will then serve as credible foundation for follow-up projects engaging in the realization of ‘More-than-Moore’ or ‘beyond CMOS’ devices.

At the forefront of nanotechnology this “DISCOVERY” will cross borders between chemistry, physics, and engineering; between the European industry partner (Dr. Mike Cooke at Oxford Instruments) and academia (Prof. Dr. Steven M. George at CU Boulder, Prof. Dr.-Ing. Thomas Mikolajick at TU Dresden & NaMLab); between the United Kingdom, the United States of America, and Germany.

further information

Further information is summarized on the following pages. Protected content is indicated by (∗).
Password is the 6-digit proposal number.

  1. motivation (proposal section 1.1) (∗)
  2. project-specific objectives & overview of the proposed action (proposal section 1.1) (∗)
  3. originality & innovation aspects: level of novelty & high-quality (proposal section 1.1) (∗)
  4. participating partner organizations
  5. institutional environment (infrastructure) (proposal section 3.3)
  6. time schedule & work plan with allocated tasks and secondment (proposal section 3.1) (∗)