Research Interests and Level of Expertise
ALP (Ångström-Level Processing)
- precursor evaluations
- process developments
- reaction mechanism studies
- nucleation & selectivity studies
- surface modification & cleaning;
expert level
since 2008:
ALD (Atomic Layer Deposition)
of oxides (Al2O3, HfO2, ZrO2, Ta2O5, RuO2), nitrides (TaxNy), and metals (Ru, Au)
since 2015:
asD (Area-Selective Deposition)
since 2017:
ALE (Atomic Layer Etching)
of oxides (Al2O3, ZrO2, SiO2, SiCOH) and nitrides (SiNx)
since 2018:
MLD (Molecular Layer Deposition)
of polymers (Nylon 2,6)
Surface Analyses/ Metrology
In Situ
since 2008:
SE (Spectroscopic Ellipsometry),
especially with real-time sampling > 1 Hz;
expert level
In Vacuo
since 2010:
PES (Photo-Electron Spectroscopy)
- XPS (x-ray photo-electron spectroscopy);
expert level - UPS (ultraviolet photo-electron spectroscopy)
since 2013:
SPM (Scanning Probe Microscopy)
- AFM (atomic force microscopy);
expert level - STM (scanning tunneling microscopy), including
STS (scanning tunneling spectroscopy)
On Site
since 2009:
QMS (Quadrupole Mass Spectrometry)
Ex Situ
since 2009:
Electrical Characterization, such as
- 4PP (four-point probe)
- current–voltage
- capacitance–voltage
- TVS BTS (triangular voltage sweep under bias and temperature stress)
since 2011:
XRD (X-Ray Diffraction)
since 2011:
XRR (X-Ray Reflectometry)
since 2015:
Raman Spectroscopy
since 2021:
GIWAXS (Grazing-Incidence Wide-Angle X-Ray Scattering)
Nanotechnology
nano-manufacturing
nano-fabrication
nano-characterization
nano-electronics
nano-materials
Thin Films
Materials Science
since 2008:
ruthenium and ruthenium oxide
since 2013:
high-k oxides (Al2O3, HfO2, ZrO2, Ta2O5)
since 2013:
graphene
since 2018:
polymers (Nylon 2,6)
Vacuum Technology
since 2008:
high- and ultra-high vacuum components, such as
- various pump types & sizes
- cross-flow & showerhead reactor designs
- seals, gas tubes, fittings, valves
- drives
- heaters, etc.
Physical Chemistry
surface chemistry
chemical physics