Research Interests and Level of Expertise
Ångström-Scale Processing (AP) expert level
- precursor evaluations
- process developments
- reaction mechanism studies
- nucleation & selectivity studies
- surface modification & cleaning
since 2008:
Atomic Layer Deposition (ALD)
of oxides (Al2O3, HfO2, ZrO2, Ta2O5, RuO2), nitrides (TaNx), and metals (Ru, Au)
since 2015:
Area-Selective Deposition (asD)
since 2017:
Atomic Layer Etching (ALE)
of oxides (Al2O3, ZrO2, SiO2, SiCOH) and nitrides (SiNx)
since 2018:
Molecular Layer Deposition (MLD)
of polymers (Nylon 2,6)
Surface Analyses/ Metrology
In Situ
since 2008:
Spectroscopic Ellipsometry (SE), expert level
especially with real-time sampling > 1 Hz
In Vacuo
since 2010:
Photo-Electron Spectroscopy (PES)
- x-ray photo-electron spectroscopy (XPS) expert level
- ultraviolet photo-electron spectroscopy (UPS)
since 2013:
Scanning Probe Microscopy (SPM)
- atomic force microscopy(AFM) expert level
- scanning tunneling microscopy (STM), including scanning tunneling spectroscopy (STS)
On Site
since 2009:
Quadrupole Mass Spectrometry (QMS) advanced level
Ex Situ
since 2009:
Electrical Characterization, such as advanced level
- four-point probe (4PP)
- current–voltage
- capacitance–voltage
- triangular voltage sweep under bias and temperature stress (TVS BTS)
since 2011:
X-Ray Diffraction (XRD) advanced level
since 2011:
X-Ray Reflectometry (XRR) advanced level
since 2015:
Raman Spectroscopy advanced level
since 2021:
Grazing-Incidence Wide-Angle X-Ray Scattering (GIWAXS)
Materials Science & Thin Films expert level
since 2008:
ruthenium and ruthenium oxide
since 2013:
high-k oxides (Al2O3, HfO2, ZrO2, Ta2O5)
since 2013:
graphene
since 2018:
polymers (Nylon 2,6)
Vacuum Technology expert level
since 2008:
high- and ultra-high vacuum components, such as
- various pump types & sizes
- cross-flow & showerhead reactor designs
- seals, gas tubes, fittings, valves
- drives
- heaters, etc.
Nanotechnology advanced level
- nano-manufacturing
- nano-fabrication
- nano-characterization
- nano-electronics
- nano-materials
Physical Chemistry advanced level
- surface chemistry
- chemical physics